Publication:
Nanotechnology for MEMS Components (2001)
Author(s): Snowdon K, McNeil C, Lakey J
- Date: 2001
- Journal: MST News
- Volume: 3
- Issue: 1
- Pages: 9-10
- Publisher: VDI - VDE Innovation und Technik GmbH
- Publication type: Article
- Bibliographic status: Published