The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor (2008)

Author(s): Ismail AK, Burdess JS, Harris AJ, Suarez G, Keegan N, Spoors JA, Chang SC, McNeil CJ, Hedley J

      • Journal: Journal of Micromechanics and Microengineering
      • Volume: 18
      • Issue: 2
      • Pages: 025021
      • Publisher: Institute of Physics Publishing Ltd.
      • Publication type: Article
      • Bibliographic status: Published

      Dr Neil Keegan
      Senior Lecturer