Publication:

Application of PARAFAC2 to fault detection and diagnosis in semiconductor etch (2001)

Author(s): Wise BM, Gallagher NB, Martin EB

      • Date: 26-04-2001
      • Journal: Journal of Chemometrics
      • Volume: 15
      • Issue: 4
      • Pages: 285-298
      • Publisher: Wiley-Blackwell Publishing Ltd.
      • Publication type: Article
      • Bibliographic status: Published

      Keywords: multiway curve resolution multivariate statistical process control batch process monitoring DECOMPOSITION

      Staff

      Professor Elaine Martin OBE
      Prof of Industrial Statistics