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Emerging Technology and Materials (ETM) Group: Clean Room L1

picture of New EECE Class 100-10000 Clean Room

New class 100-10000 clean room houses a 200mm cluster tool for ALD and metal deposition for novel gate stacks and an RTP furnace.

Device fabrication capability and equipment at ETM Group.

Further information for EEE Clean Room Users.

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School of Electrical and Electronic Engineering
Newcastle University, Newcastle upon Tyne
NE1 7RU, United Kingdom.
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Last updated 15 May, 2013 © 2013 Newcastle University