Emerging Technology and Materials (ETM) Group: Facilities

Characterisation Lab

The ETM Group's climate controlled electrical and material characterisation facilities include:

  • DC and RF 200mm probe stations for varied C-V and I-V analysis to 67GHz
  • low and high frequency noise measurement
  • specialist facilities in electrical measurement for hostile environments
  • accelerated test ovens
  • AFM, XRD, SEM, nanoindentation

Highlights

AFM/Raman system

Our state of the art AFM/Raman system with tip enhanced Raman (TERS) capability has recently demonstrated strain measurement with 25nm spatial resolution which, combined with a bevel technique for depth resolution < 1 nm, is amongst the best strain measurement capabilities in the world.

MEMs Test Equipment

For MEMs research and development the test equipment is the most advanced in the country with integrated profilometry and vibrometry for rapid testing at both wafer and packaged levels.