Emerging Technology and Materials (ETM) Group: Facilities
Fabrication
The ETM Group has a considerable fabrication capability providing flexible opportunities for research in semiconductor device processing and an excellent environment for teaching activities.
Fabrication facilities include two class 100-10000 clean rooms:
- L1 clean room: New class 100-10000 clean room (shared with CPI) houses a 200 mm cluster tool for ALD and metal deposition for novel gate stacks and an RTP furnace
- L4 clean room: Class 100-1000 clean room specialising in SiC device processing and interconnection research
In addition to its own facilities, the ETM Group has access to a 400 m2 class 100 clean-room for device fabrication, packaging and evaluation at the INEX (Innovation in Nanotechnology Exploitation) - a leading contract development, manufacturing and commercialisation centre for specialist electronic devices, microsystems and nanotechnology based at Newcastle University.
If you require more detailed information on the equipment available then please visit our device fabrication capability and equipment page.
