Publication

Evolution of strain engineering for Si technology (2007)

Author(s): O'Neill AG, Olsen SH, Tsang YL, Dobrosz P

      • Date: June 2007
      • Conference Name: INFOS
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published
        Staff

        Professor Anthony O'Neill
        Siemens Professor of Microelectronics