Publication

Nanoscale strain characterisation in patterned SSOI structures (2008)

Author(s): Dobrosz P; Olsen SH; Bull SJ; Tsang YL; Agaiby RMB; O'Neill AG; Buca D; Mantl S; Ghyselen B

      • Date: 26-30 May 2008
      • Conference Name: E-MRS 2008 Spring Conference
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published
        Staff

        Professor Anthony O'Neill
        Siemens Professor of Microelectronics

        Dr Sarah Olsen
        Senior Lecturer