Newcastle University

Publication

Design of buried hinge based 3D torsional micro mirrors (2004)

Author(s): Tian GY; Zairi S

• Date: 30 June-3 July 2004
• Conference Name: Proceedings of the Sixth IEEE CPMT Conference on High Density Microsystem Design and Packaging and Component Failure Analysis (HDP)
• Pages: 164-170
• Publisher: IEEE
• Publication type: Conference Proceedings (inc. abstract)
• Bibliographic status: Published

• URL: http://dx.doi.org/10.1109/HPD.2004.1346692
• DOI: 10.1109/HPD.2004.1346692

Staff

Professor Gui Yun Tian Professor of Sensor Technologies

Email: g.y.tian@ncl.ac.uk Telephone: +44 (0) 191 222 5151