Publication
Theoretical investigations of the diffusion of nitrogen-pair defects in silicon (2005)
Author(s): Fujita N; Jones R; Goss JP; Frauenheim T; Oberg S; Briddon PR
- Date: 25-30 September 2005
- Conference Name: Gettering and Defect Engineering in Semiconductor Technology XI
- Volume: 108-109
- Pages: 407-412
- Publisher: Uetikon-Zuerich
- Publication type: Conference Proceedings (inc. abstract)
- Bibliographic status: Published
Keywords: nitrogen defects
silicon
diffusion
dislocation locking
DISLOCATION LOCKING
FLOAT-ZONE
OXYGEN
POINTS