Publication

The principle of a MEMS circular diaphragm mass sensor (2006)

Author(s): Ismail A, Burdess J, Harris A, McNeil C, Hedley J, Chang S, Suarez G

      • Conference Name: Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators (ICEPT)
      • Volume: 2006
      • Pages: 69-74
      • Publisher: Institution of Engineering and Technology
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published