Publication

Measurement of the residual strain in strained Si/SiGe using Raman spectroscopy (2004)

Author(s): Bull SJ; Olsen SH; O'Neill AG; Dobrosz P

      • Journal: Zeitschrift fuer Metallkunde
      • Volume: 95
      • Issue: 5
      • Pages: 340-344
      • Publisher: Carl Hanser Verlag GmbH & Co. KG
      • Publication type: Article
      • Bibliographic status: Published
        Staff

        Professor Anthony O'Neill
        Siemens Professor of Microelectronics

        Dr Sarah Olsen
        Senior Lecturer