Author(s): Cowern NEB; Ahn C
Abstract: Technology computer-aided design (TCAD) is pervasive throughout research, development and manufacturing in the semiconductor industry. It allows very low-cost evaluation of process options and competing technologies, guides process development and transfer to production and supports more efficient process improvement with minimal down time in the factory environment. This paper reviews the use of TCAD in the semiconductor industry and shows, with some illustrative examples, its important enabling role for the PV industry.
Keywords: Technology Computer-Aided Design, Photovoltaics, Semiconductors, Process Physics, Device Physics, Manufacturing