Publication

Hinge sensitivity in a micro-rotating structure for predicting induced thermo mechanical stress in integrated circuit metal interconnects (2004)

Author(s): Soare SM; Wright NG; Bull SJ; Horsfall AB; dos Santos JMM; Wang K

      • Date: 1-5 December 2003
      • Conference Name: Thin Films: Stresses and Mechanical Properties X
      • Volume: 795
      • Pages: 467-472
      • Publisher: Materials Research Society
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published

        Keywords: RESIDUAL-STRESS