Publication

Frequency tuning of silicon micromechanical cantilevers by laser ablation (2003)

Author(s): Gallacher BJ, Hedley J, Burdess JS, Harris AJ

      • Date: 23-27 February 2003
      • Conference Name: Nanotechnology Conference and Trade Show (Nanotech)
      • Pages: 478-481
      • Publisher: Computational Publications
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published

        Keywords: resonators frequency tuning laser ablation GYROSCOPE