Publication

Boron uphill diffusion during ultrashallow junction formation (2003)

Author(s): Cowern NEB; Duffy R; Venezia VC; Heringa A; Husken TWT; Hopstaken MJP; Griffin PB; Wang CC

      • Date: 07-04-2003
      • Journal: Applied Physics Letters
      • Volume: 82
      • Issue: 21
      • Pages: 3647-3649
      • Publisher: American Institute of Physics
      • Publication type: Article
      • Bibliographic status: Published
      Staff

      Professor Nick Cowern
      Professor of Nanoscience / Nanotechnology