Publication

A physically based model for the spatial and temporal evolution of self-interstitial agglomerates in ion-implanted silicon (2005)

Author(s): Ortiz CJ, Pichler P, Fuhner T, Cristiano F, Colombeau B, Cowern NEB, Claverie A

      • Journal: Journal of Applied Physics
      • Volume: 96
      • Issue: 9
      • Pages: 4866-4877
      • Publisher: American Institute of Physics
      • Publication type: Article
      • Bibliographic status: Published
      Staff

      Professor Nick Cowern
      Professor of Nanoscience / Nanotechnology