Publication
Understanding the role of buried Si/SiO2 interface on dopant and defect evolution in PAI USJ (2005)
Author(s): Hamilton JJ, Collart EJH, Colombeau B, Bersani M, Giubertoni D, Sharp JA, Cowern NEB, Kirkby KJ
- Journal: Materials Science and Engineering B
- Volume: 124-125
- Pages: 215-219
- Publisher: Elsevier SA
- Publication type: Article
- Bibliographic status: Published