Publication
Modeling of extrinsic extended defect evolution in ion-implanted silicon upon thermal annealing (2004)
Author(s): Cowern NEB; Ortiz CJ; Cristiano F; Colombeau B; Claverie A
- Journal: Materials Science and Engineering B: Advanced Functional Solid-state Materials
- Volume: 114-115
- Pages: 184-192
- Publisher: Elsevier SA
- Publication type: Article
- Bibliographic status: Published