Publication

Modeling of extrinsic extended defect evolution in ion-implanted silicon upon thermal annealing (2004)

Author(s): Cowern NEB; Ortiz CJ; Cristiano F; Colombeau B; Claverie A

      • Journal: Materials Science and Engineering B: Advanced Functional Solid-state Materials
      • Volume: 114-115
      • Pages: 184-192
      • Publisher: Elsevier SA
      • Publication type: Article
      • Bibliographic status: Published
      Staff

      Professor Nick Cowern
      Professor of Nanoscience / Nanotechnology