Publication

Transient enhanced diffusion of phosphorus in silicon (1986)

Author(s): N.E.B. Cowern, D.J. Godfrey and D.E. Sykes

      • Journal: Applied Physics Letters
      • Volume: 49
      • Pages: 1711
      • Publication type: Article
      • Bibliographic status: Published
        Staff

        Professor Nick Cowern
        Professor of Nanoscience / Nanotechnology