Publication
Enhanced n-type dopant solubility in tensile-strained Si (2008)
Author(s): Bennett NS; Radamson HH; Beer CS; Smith AJ; Gwilliam RM; Cowern NEB; Sealy BJ
- Date: 2008
- Journal: Thin Solid Films
- Volume: 517
- Issue: 1
- Pages: 331
- Publisher: Elsevier SA
- Publication type: Article
- Bibliographic status: Published