Newcastle University

Publication

Defect evolution and dopant activation anomalies in ion implanted silicon (2006)

Author(s): Cristiano F, Lamrani Y, Severac F, Gavelle M, Boninelli S, Cherkashin N, Marcelet O, Claverie A, Lerch W, Paul S, Cowern NEB, Duffy R

• Type of Article: Invited paper

• Date: 14-11-2006
• Journal: Nuclear Instruments and Methods in Physics Research B
• Volume: 253
• Issue: 1-2
• Pages: 68-79
• Publisher: Elsevier BV
• Publication type: Article
• Bibliographic status: Published

• URL: http://dx.doi.org/10.1016/j.nimb.2006.10.046
• DOI: 10.1016/j.nimb.2006.10.046
• ISSN (electronic): 1872-9584

Staff

Professor Nick Cowern Professor of Nanoscience / Nanotechnology

Email: nick.cowern@ncl.ac.uk Telephone: +44 (0) 191 222 5636