Publication

Antimony for NMOS ultrashallow junctions in strained Si: a superior dopant to arsenic (2007)

Author(s): Bennett NS; Smith AJ; Gwilliam RM; Webb RP; Sealy BJ; Cowern NEB; O'Reilly L; McNally PJ

      • Date: 6-9 May 2007
      • Conference Name: INSIGHT
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Unknown
        Staff

        Professor Nick Cowern
        Professor of Nanoscience / Nanotechnology