Publication
Antimony for NMOS ultrashallow junctions in strained Si: a superior dopant to arsenic (2007)
Author(s): Bennett NS; Smith AJ; Gwilliam RM; Webb RP; Sealy BJ; Cowern NEB; O'Reilly L; McNally PJ
- Date: 6-9 May 2007
- Conference Name: INSIGHT
- Publication type: Conference Proceedings (inc. abstract)
- Bibliographic status: Unknown