Publication

Direct measurement of residual stress in integrated circuit interconnect features (2003)

Author(s): Horsfall AB, Dos Santos JMM, Soare SM, Wright NG, O'Neill AG, Bull SJ, Walton AJ, Gundlach AM, Stevenson JTM

      • Conference Name: 14th European Symposium on Raliability of Electron Devices, Failure Physics and Analysis
      • Volume: 43
      • Pages: 1797-1801
      • Publisher: Microelectronics Reliability, Pergamon
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published
      Staff

      Professor Anthony O'Neill
      Siemens Professor of Microelectronics