Publication

Nanometer Scale Strain Profiling Through Si-SiGe Heterolayers (2008)

Author(s): Agaiby RMB; Olsen SH; Dobrosz P; Coulson H; Bull SJ; O'Neill AG

      • Date: 25-27 June 2008
      • Conference Name: 50th Electronic Materials Conference (EMC 2008)
      • Publisher: The Minerals, Metals & Materials Society (TMS)
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published
        Staff

        Professor Anthony O'Neill
        Siemens Professor of Microelectronics

        Dr Sarah Olsen
        Senior Lecturer