Publication

Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation (2005)

Author(s): Soare S, Bull SJ, Oila A, O'Neill AG, Wright NG, Horsfall A, Dos Santos JMM

      • Journal: Zeitschrift für Metallkunde
      • Volume: 96
      • Issue: 11
      • Pages: 1262-1266
      • Publisher: Carl Hanser Verlag
      • Publication type: Article
      • Bibliographic status: Published
      • ISSN (electronic):
      Staff

      Professor Anthony O'Neill
      Siemens Professor of Microelectronics

      Professor Nick Wright
      Pro-Vice-Chancellor