Publication
Frequency adjustment of microelectromechanical cantilevers using electrostatic pull down (2005)
Author(s): Kafumbe SMM; Burdess JS; Harris AJ
- Journal: Journal of Micromechanics and Microengineering
- Volume: 15
- Issue: 5
- Pages: 1033-1039
- Publisher: Institute of Physics Publishing Ltd.
- Publication type: Article
- Bibliographic status: Published