Publication
Characterization of thermally oxidized Ti/SiO2 gate dielectric stacks on 4H-SiC substrate (2006)
Author(s): Mahapatra R, Poolamai N, Chattopadhyay S, Wright NG, Chakraborty AK, Coleman KS, Coleman PG, Burrows CP
Notes: Article no. 072910
3 pages
- Journal: Applied Physics Letters
- Volume: 88
- Issue: 7
- Pages: 072910
- Publisher: American Institute of Physics
- Publication type: Article
- Bibliographic status: Published