Publication
Diffusion and activation of dopants in silicon and advanced silicon-based materials (2006)
Author(s): Pichler P; Claverie A; Cristiano F; Lerch W; Paul S; Ortiz CJ; Colombeau B; Cowern NEB; Lampin E; Uppal S; Karunaratne MSA; Bonar JM; Willoughby AFW
- Conference Name: 21sth Nordic Semiconductor Meeting
- Volume: T126
- Pages: 89-96
- Publisher: Physica Scripta T, Kungliga Vetenskapsakademien
- Publication type: Conference Proceedings (inc. abstract)
- Bibliographic status: Published