Publication

Diffusion and activation of dopants in silicon and advanced silicon-based materials (2006)

Author(s): Pichler P; Claverie A; Cristiano F; Lerch W; Paul S; Ortiz CJ; Colombeau B; Cowern NEB; Lampin E; Uppal S; Karunaratne MSA; Bonar JM; Willoughby AFW

      • Conference Name: 21sth Nordic Semiconductor Meeting
      • Volume: T126
      • Pages: 89-96
      • Publisher: Physica Scripta T, Kungliga Vetenskapsakademien
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published
      Staff

      Professor Nick Cowern
      Professor of Nanoscience / Nanotechnology