Publication

Ge out-diffusion and its effect on electrical properties in s-Si/SiGe devices (2006)

Author(s): Uppal S, Kanoun M, Chattopadhyay S, Agaiby R, Olsen SH, Bull SJ, O'Neill A

      • Date: 18-19 April 2006
      • Conference Name: Materials Research Society Symposium Proceedings: MRS Spring Meeting
      • Volume: 912
      • Pages: 65-70
      • Publisher: Materials Research Society
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published
        Staff

        Professor Anthony O'Neill
        Siemens Professor of Microelectronics