Mechanical properties of a 3C-SiC film between room temperature and 600 °c (2007)

Author(s): Pozzi M, Hassan M, Harris AJ, Burdess JS, Jiang L, Lee KK, Cheung R, Phelps GJ, Wright NG, Zorman CA, Mehregany M

      • Journal: Journal of Physics D: Applied Physics
      • Volume: 40
      • Issue: 11
      • Pages: 3335-3342
      • Publisher: Institute of Physics Publishing Ltd.
      • Publication type: Article
      • Bibliographic status: Published