Publication

Measurement of the Residual Macro and Microstrain in Strained Si/SiGe using Raman Spectroscopy Z Metal (2004)

Author(s): Dobrosz P, Bull SJ, Olsen SH, O'Neill AG

      • Journal: Materials Research Society Symposium Proceedings: High-Mobility Group-IV Materials and Devices
      • Volume: 809
      • Pages: 340-344
      • Publisher: Materials Research Society
      • Publication type: Article
      • Bibliographic status: Published
      Staff

      Professor Anthony O'Neill
      Siemens Professor of Microelectronics

      Dr Sarah Olsen
      Senior Lecturer