Publication

Impact of Ge diffusion and wafer cross hatching on strained Si MOSFET electrical parameters (2004)

Author(s): Driscoll LS, Olsen S, Chattopadhyay S, O'Neill AG, Kwa K

      • Date: 13-16 April 2004
      • Conference Name: International Conference on Materials Research Symposium (MRS)
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published
        Staff

        Professor Anthony O'Neill
        Siemens Professor of Microelectronics