Publication

Vacancy engineering - An ultra-low thermal budget method for high-concentration 'diffusionless' implantation doping (2008)

Author(s): Cowern NEB; Pakfar A; Smith AJ; Bennett N; Sealy BJ; Gwilliam R; Webb RP; Colombeau B; Paul S; Lerch W

      • Conference Name: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing
      • Volume: 573-574
      • Pages: 295-304
      • Publisher: Trans Tech Publications Ltd.
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published
      Staff

      Professor Nick Cowern
      Professor of Nanoscience / Nanotechnology