Publication

3D determination of a MOSFET gate morphology by FIB tomography (2003)

Author(s): Inkson BJ; Olsen S; Norris DJ; O'Neill AG; Mobus G

      • Date: 31st March 2003
      • Conference Name: Conference on Microscopy of Semiconducting Materials
      • Pages: 611-616
      • Publisher: IOP Publishing
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published

        Keywords: ION-BEAM MICROSCOPY RECONSTRUCTION

        Staff

        Professor Anthony O'Neill
        Siemens Professor of Microelectronics

        Dr Sarah Olsen
        Senior Lecturer