Publication

Enhanced Antimony Activation for Ultra-Shallow Junctions in Strained Silicon (2006)

Author(s): Bennett NS, Smith AJ, Beer CS, O'Reilly L, Colombeau B, Dilliway GD, Harper R, McNally PJ, Gwilliam R, Cowern NEB, Sealy BJ

      • Date: April 2006
      • Conference Name: Symposium C, Materials Research Society Spring Meeting
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published
        Staff

        Professor Nick Cowern
        Professor of Nanoscience / Nanotechnology