Publication

Current understanding and modeling of B diffusion and activation anomalies in preamorphized ultra-shallow junctions (2004)

Author(s): Cowern NEB; Colombeau B; Smith AJ; Pawlak BJ; Cristiano F; Duffy R; Claverie A; Ortiz CJ; Pichler P; Lampin E; Zechner C

      • Date: 13-15 April 2004
      • Conference Name: Silicon Front-End Junction Formation-Physics and Technology
      • Volume: 810
      • Pages: 91-102
      • Publisher: Materials Research Society
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published
        Staff

        Professor Nick Cowern
        Professor of Nanoscience / Nanotechnology