Publication

Enhanced nitrogen diffusion in 4H-SiC (2002)

Author(s): Wright NG; Vassilevski K; Ortolland S; Phelps GJ; O'Neill AG; Horsfall A; Chester EG; Johnson CM; Gwilliam RM; Coleman PG; Burrows CP

      • Date: 01-01-2002
      • Journal: Applied Physics Letters
      • Volume: 80
      • Issue: 2
      • Pages: 228-230
      • Publisher: American Institute of Physics
      • Publication type: Article
      • Bibliographic status: Published

      Keywords: ION-IMPLANTATION BORON

      Staff

      Dr Graeme Chester
      Senior Lecturer

      Professor Anthony O'Neill
      Siemens Professor of Microelectronics

      Dr Konstantin Vasilevskiy
      Senior Research Associate

      Professor Nick Wright
      Pro-Vice-Chancellor