Publication

Fabrication of SiC microelectromechanical systems using one-step dry etching (2003)

Author(s): Jiang LD, Cheung R, Hassan M, Harris AJ, Burdess JS, Zoman CA, Mehregany M

      • Date: 27-30 May 2003
      • Conference Name: Journal of Vacuum Science and Technology B: 47th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication (EIPBN)
      • Volume: 21 (6)
      • Pages: 2998-3001
      • Publisher: American Institute of Physics
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published

      Keywords: SILICON-CARBIDE SF6/O-2 PLASMA FILMS

      Staff

      Dr Alun Harris
      Senior Lecturer-Special Project (Mumbai)