Newcastle University

Background

Dr Alun James Harris is a lecturer with research interests that include micromechanics, optoelectronics, sensors and actuators.

In the field of micromechanics, current research includes the development of optical testing and processing methods and the study of vibratory structures with particular application to microgyros.

In collaboration with other members of the Centre for Nanoscale Science and Technology MEMS sensors are being developed for medical and biological applications.

Projects

• Bonas Industrial case
  Project Leader(s): Dr A.J. Harris
• Development of Low Damage Dry Etch Processes for Silicon Carbide Microelectromechanical Systems (MEMS)
  Project Leader(s): Dr Alun Harris
• Engineering Doctorate
  Project Leader(s): Prof. Paul Acarnley, Prof. Alan Jack
• Evaluation of MEMS Resonant Mass Sensors for Generic Specific Binding Analysis' (MEMSens2)
• Healthy Aims: Nano Scale Materials and Sensors and Microsystems for Medical Implants Improving Health and Quality of Life
• IMEMS
  Project Leader(s): Dr. A.J. Harris
• Implantable micro-sensors and micro-systems for ambulatory measurement and control in medical products
  Project Leader(s): Prof. Ken Snowdon
• Inertial Sensors
  Project Leader(s): Dr A. J. Harris
• Integration of Microelectromechanical Systems (MEMS) with Electronics in Silicon Carbide for Harsh Environments
  Project Leader(s): Dr Alun Harris
• Microelectromechanical resonant mass sensors for generic specific binding analysis
  Project Leader(s): Prof. Calum McNeil
• Microelectromechanical resonant mass sensors for generic specific binding analysis (MEMSens)
  Project Leader(s): Prof. Calum McNeil
• Multi-Access Gyroscope
  Project Leader(s): Dr A.J. Harris
• Optical testing of integrated microelectromechanical systems (MEMS) for production
  Project Leader(s): Dr Alun Harris
• Quartz Gyroscope
  Project Leader(s): Dr Alun J. Harris
• Raman Spectroscopy in Microengineered Structures
  Project Leader(s): Dr A.J. Harris
• Rapid Stroke Marker Detection via Immunosensors utilising Labeless Electromechanical and Resonant Mass Detection
  Project Leader(s): Prof. Calum McNeil
• Research and Development of MEMSens Biosensors
  Project Leader(s): Dr Alun Harris
• SAFER - Isolation of foetal cells from maternal blood: a nanomolecular approach
  Project Leader(s): Prof. Calum McNeil
• SMARTHEALTH - Smart Integrated Biodiagnostic Systems for Healthcare
  Project Leader(s): Prof. Calum McNeil
• SMILE

• Gallacher BJ, Neasham JA, Burdess JS, Harris AJ. Initial Test Results from a 3-axis Vibrating Ring Gyroscope. In: Journal of Physics, Conference Series: International MEMS Conference.2006,Singapore:Institute of Physics Publishing Ltd.
• Neasham J, Burdess JS, Gallacher BJ, Harris AJ. Initial test results from a 3-axis vibrating ring gyroscope. Journal of Physics : Conference Series 2006, 34, 662-667.
• Jiang L, Cheung R, Hedley J, Hassan M, Harris AJ, Burdess JS, Mehregany M, Zorman CA. SiC cantilever resonators with electrothermal actuation. Sensors and Actuators A: Physical 2006, 128(2), 376-386.
• Ismail AK, Burdess JS, Harris AJ, McNeil CJ, Hedley J, Chang SC, Suarez G. The principle of a MEMS circular diaphragm mass sensor. Journal of Micromechanics and Microengineering 2006, 16(8), 1487-1493.
• Ismail A, Burdess J, Harris A, McNeil C, Hedley J, Chang S, Suarez G. The principle of a MEMS circular diaphragm mass sensor. In: Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators (ICEPT). 2006, London, UK: Institution of Engineering and Technology.
• Gallacher BJ, Burdess JS, Harris AJ, Harish KM. Active Damping Control in MEMS Using Parametric Pumping. In: Nanotechnology Conference .2005,Anaheim, California, USA:CRC Press
• Jiang L, Hassan M, Cheung R, Harris AJ, Burdess JS, Zorman CA, Mehregany M. Dry release fabrication and testing of SiC electrostatic cantilever actuators. In: Microelectronic Engineering: 30th International Conference on Micro- and Nano-Engineering.2005,:Elsevier BV
• Gallacher BJ, Hedley J, Burdess JS, Harris AJ, Rickard A, King DO. Electrostatic correction of structural imperfections present in a microring gyroscope. Journal of Microelectromechanical Systems 2005, 14(2), 221-234.
• Kafumbe SMM, Burdess JS, Harris AJ. Frequency adjustment of microelectromechanical cantilevers using electrostatic pull down. Journal of Micromechanics and Microengineering 2005,15 5 1033-1039.
• Enderling S, Brown III CL, Balakrishnan M, Hedley J, Stevenson JTM, Bond S, Dunare CC, Harris AJ, Burdess JS, Mitkova M, Kozicki MN, Walton AJ. Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators. In: Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005, Miami Beach, Florida, USA: IEEE.
• Hedley J, McNeil CJ, Burdess JS, Harris AJ, Dobson MG, Suarez G, Berney H. A generic sensor for ultra low analyte concentration detection. In: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2004). 2004, Boston, MA: Nano Science and Technology Institute.
• Hedley J, McNeil CJ, Burdess JS, Harris AJ, Dobson MG, Suarez G, Berney H. A generic sensor for ultra low analyte concentration detection. In: Nanotechnology Conference and Trade Show (Nanotech). 2004, Boston, Massachusetts, USA: CRC Press.
• Hedley J, Burdess JS, Harris AJ, Gallacher BJ, McNeil CJ, Cumpson PJ, Enderling S. An optical workstation for characterization and modification of MEMS. In: Optical Micro- and Nanometrology in Manufacturing Technology. 2004, Strasbourg, France: SPIE.
• Hedley J, Burdess JS, Harris AJ, Gallacher BJ. Device characterization at the wafer level via optical actuation and detection. In: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2004). 2004, Boston, MA: Nano Science and Technology Institute.
• Hedley J, Burdess JS, Harris AJ, Gallacher BJ. Device characterization at the wafer level via optical actuation and detection. In: Nanotechnology Conference and Trade Show (Nanotech). 2004, Boston, Massachusetts, USA: CRC Press.
• Gallacher BJ, Hedley J, Burdess JS, Harris AJ, Rickard A, King D. Electrostatic tuning of a micro-ring gyroscope. In: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2004). 2004, Boston, MA: Nano Science and Technology Institute.
• Enderling S, Jiang L, Ross AWS, Bond S, Hedley J, Harris AJ, Burdess JS, Cheung R, Zorman CA, Mehregany M, Walton AJ. MEMS resonator tuning using focused ion beam platinum deposition. In: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2004). 2004, Boston, MA: Nano Science and Technology Institute.
• Suarez G, Jackson RJ, McNeil CJ, Burdess JS, Harris AJ, Hedley J. Oriented integration of glycoproteins onto a generic mass sensor system. In: Eurosensors XVIII.2004,Rome, Italy
• Gallacher J, Burdess JS, Harris AJ, Hedley J. The application of parametric excitation to a micro-ring gyroscope. In: Nanotechnology Conference and Trade Show (Nanotech). 2004, Boston, Massachusetts, USA: CRC Press.
• Gallacher BJ, Burdess JS, Harris AJ, McNie ME. The Design and Fabrication of Multi-Axis Vibrating Ring Gyroscope. In: DGON Symposium Gyro Technology.2004,Stuttgart, Germany
• Burdess JS, Harris AJ, Gallacher BJ, Hedley J. [Keynote talk] Vibrating and resonant MEMS sensors. In: 11th World Congress in Mechanism and Machine Science. 2003, Tiangin, China: China Machinery Press.
• Jiang LD, Cheung R, Hassan M, Harris AJ, Burdess JS, Zoman CA, Mehregany M. Fabrication of SiC microelectromechanical systems using one-step dry etching. In: Journal of Vacuum Science and Technology B: 47th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication (EIPBN). 2003, Tampa, Florida, USA: American Institute of Physics.
• Gallacher BJ, Hedley J, Burdess JS, Harris AJ. Frequency tuning of silicon micromechanical cantilevers by laser ablation. In: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2003). 2003, San Francisco, California, USA: Nano Science and Technology Institute.
• Gallacher BJ, Hedley J, Burdess JS, Harris AJ. Frequency tuning of silicon micromechanical cantilevers by laser ablation. In: Nanotechnology Conference and Trade Show (Nanotech). 2003, San Francisco, California, USA: Computational Publications.
• Gallacher BJ, Burdess JS, Harris AJ, McNie ME. Initial Test Results of a Multi-Axis Vibrating Ring Gyroscope and Issues Associated with its Fabrication. In: Symposium Gyro Technology. 2003, Stuttgart, Germany.
• Gallacher BJ, Burdess JS, Harris AJ, McNie ME. Principles of a three-axis vibrating gyroscope. IEEE Transactions on Aerospace and Electronic Systems 2001, 37(4), 1333-1343.
• Bowden M, Gardiner DJ, Wood D, Burdess J, Harris A, Hedley J. Raman and finite-element analysis of a mechanically strained silicon microstructure. Journal of Micromechanics and Microengineering 2001, 11(1), 7-12.
• Hedley J, Harris A, Burdess J, McNie M. The development of a workstation for optical testing and modification of IMEMS on a wafer. In: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001. 2001, Cannes, France: SPIE.
• Burdess JS, Harris AJ, Wood D, Cruickshank JL. The dynamics of a vibrating silicon diaphragm microgyroscope. Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 2000, 214(11), 1379-1388.
• Burdess JS, Harris AJ, Wood D, Pitcher R. The structural characteristics of microengineered bridges. Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering 2000, 214(2), 351-357.
• McNiew, M.E., Burdess, J.S., Harris, A.J., Young, M. High aspect ratio ring gyroscopes fabricated in <100> silicon on insulator (SOI) material. In: International Conference on Solid-State Sensors and Actuators. 1999.
• Harris AJ, Burdess JS, Wood D, Langford R. Issues associated with the design, fabrication and testing of a crystalline silicon ring gyroscope with electromagnetic actuation and sensing. Journal of Micromechanics and Microengineering, 8, No 4, 284-292 1998.
• A.J. Harris,D. Wood,J.S. Burdess. Actuators and their mechanisms in microengineering. IEE Engineering Science and Education Journal, 7, No 1, 19-27 1998.
• A.J. Harris,C.I. Swift. Bend loss in neodymium doped fiber lasers. IEEE Journal of Lightwave Technology, 16, No 3, 428-432 1998.
• Bowden M, Gardiner DJ, Lourenco MA, Hedley J, Wood D, Burdess JS, Harris AJ. Dopant mapping and strain analysis in B doped silicon structures using micro-Raman spectroscopy. In: 1998 MRS Spring Symposium. 1998, San Francisco, CA, USA: Materials Research Society.
• A.J. Harris,J.S. Burdess,D. Wood,R. Langford. Issues associated with the design, fabrication and testing of a crystalline silicon ring gyroscope with electromagnetic actuation and sensing. Journal of Micromechanics and Microengineering, 8, No 4, 284-292 1998.
• Burdess JS, Harris BJ, Wood D, Pitcher RJ. A system for the dynamic characterisation of microstructures. J. Microelectromechanical Systems, 6(4), 322-328 1997.