Publication:

Step bunching fabrication constraints in silicon carbide (2002)

Author(s): Phelps GJ; Wright NG; Chester EG; Johnson CM; O'Neill AG

      • Journal: Semiconductor Science and Technology
      • Volume: 17
      • Issue: 5
      • Pages: L17-L21
      • Publisher: Institute of Physics Publishing Ltd.
      • Publication type: Article
      • Bibliographic status: Published