Publication:

Dynamic characterization of MEMS using Raman spectroscopy (2008)

Author(s): Hu ZX, Hedley J, Gallacher BJ, Arce-Garcia I

      • Date: 13-08-2008
      • Journal: Journal of Micromechanics and Microengineering
      • Volume: 18
      • Issue: 9
      • Pages: 095019
      • Publisher: Institute of Physics Publishing Ltd.
      • Publication type: Article
      • Bibliographic status: Published

      Keywords: SILICON STRESS SYSTEM WAFER

      Staff

      Dr Barry Gallacher
      Reader in Engineering Dynamics

      Dr John Hedley
      Senior Lecturer

      Dr Zhongxu Hu
      Senior Research Associate