Publication:
The principle of a MEMS circular diaphragm mass sensor (2006)
Author(s): Ismail A, Burdess J, Harris A, McNeil C, Hedley J, Chang S, Suarez G
- Conference Name: Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators (ICEPT)
- Volume: 2006
- Pages: 69-74
- Publisher: Institution of Engineering and Technology
- Publication type: Conference Proceedings (inc. abstract)
- Bibliographic status: Published