Publication:
Piezoelectrically Actuated Circular Diaphragm Resonator Mass Sensors (2012)
Author(s): Keegan N, Hedley J, Hu ZX, Spoors JA, Waugh W, Gallacher BJ
- Date: 5-8 March 2012
- Conference Name: 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
- Pages: 73-77
- Publisher: IEEE
- Publication type: Conference Proceedings (inc. abstract)
- Bibliographic status: Published