Publication:

Metrology at the nano scale (2005)

Author(s): Sheridan B, Cumpson P, Bailey M

      • Date: 01-08-2005
      • Journal: Physics World
      • Volume: 18
      • Issue: 8
      • Pages: 37-40
      • Publisher: Institute of Physics Publishing Ltd.
      • Publication type: Article
      • Bibliographic status: Published
        Staff

        Professor Peter Cumpson
        Science City Prof in MEMS