Publication:
The development of a workstation for optical testing and modification of IMEMS on a wafer (2001)
Author(s): Hedley J, Harris A, Burdess J, McNie M
- Conference Name: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
- Volume: 4408
- Pages: 402-408
- Publisher: SPIE
- Publication type: Conference Proceedings (inc. abstract)
- Bibliographic status: Published