The development of a workstation for optical testing and modification of IMEMS on a wafer (2001)

Author(s): Hedley J, Harris A, Burdess J, McNie M

      • Conference Name: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
      • Volume: 4408
      • Pages: 402-408
      • Publisher: SPIE
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published

      Dr John Hedley
      Senior Lecturer