Frequency tuning of silicon micromechanical cantilevers by laser ablation (2003)

Author(s): Gallacher BJ, Hedley J, Burdess JS, Harris AJ

      • Conference Name: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2003)
      • Volume: 1
      • Pages: 478-481
      • Publisher: Nano Science and Technology Institute
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published

      Emeritus Professor James Burdess
      Emeritus Professor

      • Telephone: +44 (0) 191 208 6166

      Dr Barry Gallacher
      Reader in Engineering Dynamics

      Dr John Hedley
      Senior Lecturer