Publication:
Frequency tuning of silicon micromechanical cantilevers by laser ablation (2003)
Author(s): Gallacher BJ, Hedley J, Burdess JS, Harris AJ
- Conference Name: NSTI Nanotechnology Conference and Trade Show (NSTI Nanotech 2003)
- Volume: 1
- Pages: 478-481
- Publisher: Nano Science and Technology Institute
- Publication type: Conference Proceedings (inc. abstract)
- Bibliographic status: Published