Accurate force measurement in the atomic force microscope: A microfabricated array of reference springs for easy cantilever calibration (2003)

Author(s): Cumpson PJ, Hedley J, Zhdan P

      • Journal: Nanotechnology
      • Volume: 14
      • Issue: 8
      • Pages: 918-924
      • Publisher: Institute of Physics Publishing
      • Publication type: Article
      • Bibliographic status: Published

      Professor Peter Cumpson
      Science City Prof in MEMS

      Dr John Hedley
      Senior Lecturer