Publication:
An optical workstation for characterization and modification of MEMS (2004)
Author(s): Hedley J, Burdess JS, Harris AJ, Gallacher BJ, McNeil CJ, Cumpson PJ, Enderling S
- Conference Name: Optical Micro- and Nanometrology in Manufacturing Technology
- Volume: 5458
- Pages: 244-252
- Publisher: SPIE
- Publication type: Conference Proceedings (inc. abstract)
- Bibliographic status: Published