Publication:

An optical workstation for characterization and modification of MEMS (2004)

Author(s): Hedley J, Burdess JS, Harris AJ, Gallacher BJ, McNeil CJ, Cumpson PJ, Enderling S

      • Conference Name: Optical Micro- and Nanometrology in Manufacturing Technology
      • Volume: 5458
      • Pages: 244-252
      • Publisher: SPIE
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published
      Staff

      Professor James Burdess
      Strategic Research Adviser

      • Telephone: +44 (0) 191 208 6166

      Dr Barry Gallacher
      Reader in Engineering Dynamics

      Dr John Hedley
      Senior Lecturer