Calibration of AFM cantilever stiffness: A microfabricated array of reflective springs (2004)

Author(s): Cumpson PJ, Zhdan P, Hedley J

    Notes: Paper originally presented at the 5th International Conference on Scanning Probe Micrscopy, Sensors and Nanostructures, Heythrop Park, Oxfordshire, UK, 23-26 May 2003

      • Journal: Ultramicroscopy
      • Volume: 100
      • Issue: 3-4
      • Pages: 241-251
      • Publisher: Elsevier BV
      • Publication type: Article
      • Bibliographic status: Published

      Professor Peter Cumpson
      Science City Prof in MEMS

      Dr John Hedley
      Senior Lecturer